離子蝕薄機

廠牌: E.A.Fischione , Inc. 型號: Model 1010 (LAMP) Low Angle Milling & Polishing System

應用:
穿透式電子顯微鏡(TEM)已廣泛應用在材料分析上,由於TEM分析的是穿透過試片的電子束，所以試片的厚度必須小於100nano-meter，且試片的直徑僅為3mm，欲得到這麼薄的試片，可藉助於超薄切割機或研磨技術後再經由離子減薄機做最後的減薄。而當試片放入離子減薄機 (Ion Miller) 中修薄，通入高純度氬氣，由高角度逐漸往低角度移動（大約0∼45。），離子束能量約0.5∼6.0KV，修到試片出現破洞並擴大到界面附近，已達到薄區小於100nano-meter, 達到觀察TEM的試片厚度要求.

優點:
◎ Fully programmable and easy to use.
◎ Two independently adjustable Hollow Anode Discharge (HAD) ion sources.
◎ High or low energy operation for either rapid milling or more gentle specimen polishing.
◎ Individual, automatic ion source gas control.
◎ Oil-free vacuum system.
◎ Continuously adjustable milling angle.
◎ Specimen rotation or rocking.
◎ Accommodates SEM samples.
◎ Chemically assisted and reactive etching.
◎ Automatic termination.
◎ Liquid nitrogen-cooled specimen stage.